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DONG Shuxiang, WANG Shuxin, SHEN Wenjiang, LI Longtu, GUI Zhilun, QIU Haibo. Rod-type ultrasonic mini-motor based on bending vibration mode[J]. ACTA ACUSTICA, 1999, 24(2): 120-127. DOI: 10.15949/j.cnki.0371-0025.1999.02.002
Citation: DONG Shuxiang, WANG Shuxin, SHEN Wenjiang, LI Longtu, GUI Zhilun, QIU Haibo. Rod-type ultrasonic mini-motor based on bending vibration mode[J]. ACTA ACUSTICA, 1999, 24(2): 120-127. DOI: 10.15949/j.cnki.0371-0025.1999.02.002
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Rod-type ultrasonic mini-motor based on bending vibration mode

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    • Abstract
  • A rod-type piezoelectric ultrasonic micro-motor based on bending vibration mode with improving construction was studied experimentally in this paper. The prototype motor with diameter of 15 mm and length of 25 mm has demonstrated its super characteristics such as very high resolution(0.01°), low speed with large torque output (30 r/min ~ 70 r/min and 0.55 kg. cm etc. and it has been successfully applied to precise positioner with multi-freedom for laser resonant cavity.
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