High frequency bulk acoustic wave IDT on a grooved surface

XU Lian; ZHOU Xianwen; WANG Chenghao

doi:10.15949/j.cnki.0371-0025.1993.02.005

XU Lian, ZHOU Xianwen, WANG Chenghao. High frequency bulk acoustic wave IDT on a grooved surface[J]. ACTA ACUSTICA, 1993, 18(2): 119-121. DOI: 10.15949/j.cnki.0371-0025.1993.02.005

Citation:

XU Lian, ZHOU Xianwen, WANG Chenghao. High frequency bulk acoustic wave IDT on a grooved surface[J]. ACTA ACUSTICA, 1993, 18(2): 119-121. DOI: 10.15949/j.cnki.0371-0025.1993.02.005

Citation:

XU Lian, ZHOU Xianwen, WANG Chenghao. High frequency bulk acoustic wave IDT on a grooved surface[J]. ACTA ACUSTICA, 1993, 18(2): 119-121. DOI: 10.15949/j.cnki.0371-0025.1993.02.005

High frequency bulk acoustic wave IDT on a grooved surface

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In this paper, we introduce a new kind of bulk-acoustic-wave transducer consisting of interdigital electrodes on a grooved surface of piezoelectric material. The shearwave transducer fabricated on X-cut LiNbO₃ has a conversion loss as low as 3.8dB at 213MHz.

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High frequency bulk acoustic wave IDT on a grooved surface

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