四激励二维正交复合夹心式压电超声换能器的设计
Design of 2D orthogonal composite sandwich piezoelectric ultrasonic transducer excited by four piezoelectric stacks
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摘要: 提出了一种四激励二维正交复合夹心式压电超声换能器, 换能器由四组纵向极化压电陶瓷晶堆、一个中心耦合金属块和四个外部金属圆锥组成。基于二维耦合振动机理和机电类比原理, 建立了换能器的等效电路模型并推导了其谐振频率方程。利用有限元软件仿真分析了四激励正交复合换能器的频响特性和振动特性, 并与其单独一个方向振子的振动特性进行了对比。加工了反相和同相模态的换能器, 利用阻抗分析仪和激光测振仪测试了其频率响应和二维四向纵振动输出特性, 并进行了大功率二维四向超声乳化实验测试。理论、仿真和实验结果表明: 换能器具有反相和同相两个纵向正交共振模态, 在这两种共振模态下均可实现二维四向纵振动输出, 且换能器两个正交方向振子的纵向振动具有相互耦合加强的作用; 等效电路法和有限元法所得换能器的共振频率和有效机电耦合系数与实验测试结果吻合, 通过与单激励正交复合夹心式压电超声换能器的有效机电耦合系数对比, 发现该换能器具有更高的有效机电耦合系数。Abstract: A 2D orthogonal composite sandwich piezoelectric ultrasonic transducer excited by four piezoelectric stacks is proposed by using a central coupling metal block, four piezoelectric stacks and four front conical metal mass. Based on the principle of 2D coupled vibration and the electro-mechanical analogy principle, the equivalent circuit model of the transducer is established and its resonance frequency equation is derived. The finite element software is used to simulate and analyze the frequency response characteristics and vibration characteristics of the transducer, and compared with the vibration characteristics of a single directional vibrator of the transducer. The transducer of anti-phase mode and the transducer of in-phase mode were processed. Their frequency response and 2D four direction longitudinal vibration output characteristics were measured by the impedance analyzer and the laser vibrometer, and the transducer of in-phase was tested by the high-power 2D four direction ultrasonic emulsification experiment. The theoretical, the simulated and the experimental results demonstrate that the transducer has two longitudinal orthogonal vibration of anti-phase and in-phase modes, and 2D four-directional longitudinal vibration output is achieved in both resonance modes. In addition, the longitudinal vibration of the two orthogonal vibrators of the transducer has the effect of mutual coupling and strengthening. The resonance frequency and the effective electro-mechanical coupling factor of the transducer calculated by the equivalent circuit method and the finite element method are basically consistent with the results of the experiment. By comparing with the effective electro-mechanical coupling factor of the 2D orthogonal composite sandwich piezoelectric ultrasonic transducer excited by single piezoelectric stack, it is found that the transducer excited by four piezoelectric stacks has a greater effective electro-mechanical coupling factor.