一种热对流式MEMS二维质点振速传感器
A novel two-dimensional thermal-convection based MEMS acoustic vector sensor
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摘要: 由空气质点振速传感器和声压传感器组成的矢量传声器是测量声场空间信息的重要方式。本文设计了一种新型热对流式二维质点振速传感器, 不同于传统平行线式传感机制, 该器件由多线进行交叉连结形成一个中央十字加热器和四个直角测温线, 构成新的局域加热和温度传感方式, 基于此设计能够获得更高的灵敏度并具有理想的正交性。通过数值分析对其传感机制进行了详细分析, 并使用MEMS工艺进行器件制备和性能验证。实验结果表明, 该器件具有良好的响应灵敏度和接近完美的正交指向性。所提出器件在体积受限的声场测量中具有潜在应用价值。Abstract: An acoustic vector sensor is an important sensor for capturing sound field information. In various applications, a precise integrated 2D sensor is desired, but manufacturing remains challenging. A novel 2D thermal convection based acoustic vector sensor is introduced, which consists of crossed multiple wires. The central crossed wire acts as a heater and the four right-angle shape wires act as thermal detectors. Based on this design, the sensor provides higher sensitivity and a direct two-dimensional acoustic particle velocity measurement. The sensor is optimized by numerical simulation and then fabricated using MEMS process. Finally, experiments have demonstrated that the device has good sensitivity response and orthogonal characteristics.
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