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中文核心期刊

应用于气体传感器的多波导层Love波器件的温度特性研究

A study on temperature characteristic of multi-waveguides Love wave device used for gas sensor

  • 摘要: 为获得趋于零温度系数的多波导层Love波器件结构参数,对Love波器件的温度稳定性进行了研究。首先构建了这种多波导层条件下Love波传播特性的理论模型,即根据层状结构声波传播方程和边界条件推导出Love波的色散方程,再结合色散方程和Tomar的方法,成功提取出趋于零温度系数的Love器件结构参数,并通过实验验证了理论计算结果,实验测试得到的基于ST-90°X石英且采用SU-8与SiO2双波导层的Love波延迟线器件的频率温度系数(tcf)仅为2.16 ppm/℃。优化后的器件具有很好的实际意义。

     

    Abstract: This paper aimed at extracting optimal structural parameters for multi-waveguides Love wave device to improve its temperature stability.The theoretical model dealing with the Love wave propagation in multi-waveguides was established in the first,the dispersion characteristic is depicted by the acoustic propagation theory of stratified media and boundary conditions.Combing with the dispersion characteristics and Tomar's method,the optimal structural parameters for the Love wave device with zero temperature coefficient were extracted,and confirmed by the following experimental results.Excellent temperature coefficient of the Love wave device with SU-8/SiO2 on ST-90°X quartz substrate is evaluated experimentally as only 2.16 ppm/℃,which agrees well with the calculated results.The optimized Love wave device is useful and practical in gas sensing application.

     

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