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中文核心期刊

硅酸镓镧晶体温度、应力敏感特性及优化切向研究

Research on temperature and stress sensitive characteristics of piezoelectric crystal La3Ga5SiO14 and optimal cuts

  • 摘要: 从叠加偏载的运动方程出发,借助微扰理论推导了压电晶片上声表面波波速的温度、应力敏感模型,提出了应力敏感系数的概念。分析了硅酸镓镧晶体在双旋转平面内的温度和应力敏感特性,并以等高线的形式给出了理论计算结果。结合机电耦合系数及束偏向等其它特性,提出了一些具有潜在应用价值的优化切向。对欧拉角为(0,150°,22°)切向基片的温度和应力敏感特性进行了实验研究。通过对石英和硅酸镓镧两种晶体的理论计算和实验比较,验证了本文理论方法和计算结果的正确性。

     

    Abstract: Starting from the equations of motion for small dynamic fields superposed on a bias, helped with the perturbation theory, the model relating the velocity shifts of SAW (Surface Acoustic Wave) to temperature and stress is deduced and six independent sensitive coefficients relating the six tensor components of stress are then defined. The temperature and stress sensitivity of La3Ga5SiO14 in double rotated plane are investigated. The calculated results are presented with the aid of contour plots. Combining with the electromechanical coupling and power flow angle characteristics, some optimal propagation and cut directions of SAW substrate with potential application values for frequency control or sensor are put forward. And to the substrate defined by Euler angle (0,150°,22°), the temperature and stress sensitive characteristics are investigated through experimentation. The validity of the calculation methods and results in this paper are tested by the comparison between theoretical results and experimental ones for both quartz and La3Ga5SiO14.

     

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