高频沟槽叉指体声波换能器
High frequency bulk acoustic wave IDT on a grooved surface
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摘要: 本文介绍了一种由压电晶体沟槽表面上的叉指换能器构成的新型体声波换能器。制作在X切LiNbO3,表面的横波换能器在213MHz时的一次换能损耗为3.8dB。Abstract: In this paper, we introduce a new kind of bulk-acoustic-wave transducer consisting of interdigital electrodes on a grooved surface of piezoelectric material. The shearwave transducer fabricated on X-cut LiNbO3 has a conversion loss as low as 3.8dB at 213MHz.