板波声延迟线
PLATE WAVE DELAY LINE
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摘要: 实用的直列式声表面波超声延迟线由于适用基片大小的限制,其可达延时上限对LiNbO3而言约为50μs,锗酸铋约为100μs。虽有其它改进结构能增加时延,但所用基片面积也成比例增大,实用中是不可取的。本文提出一种新型延迟线。其基本结构仍为表面声波技术中常用的叉指换能器和表面浅沟槽栅阵,但其主要工作模式为板波。其基本工作原理为沟槽栅阵处瑞利波和板波间的高效转换现象。本文主要从实验上表明,在相同大小的基片上,这种新结构可获得数倍于常规声表面延迟线的延时。同时以耦合模理论给出半定量的分析模型。Abstract: A new kind of realizable ultrasonic delay line is proposed for long time delay application,which is based on the conversion between Rayleigh waves and plate waves by shallow groove gratings on substrate surface.The experimental devices fabricated on YZ-LiNbO3 have exhibited the ability to delay a narrow band signal for a delay time a couple of times longer than its Rayleigh wave counterpart.Because they are made with the same planar lithographic technology as that used in SAW devices,the new configuration retains advantages of reliability and reprodu-cibility.Approximate analysis for the device is provided for understanding its operation.