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声表面波机电耦合系数与短路金属栅阵的变分分析

VAR1ATIONAL ANALYSIS OF SAW PIEZOELECTRIC COUPLING COEFFICIENT AND THE SHORTED-CIRCUIT METAL STRIP GRATING

  • 摘要: 本文给出一个变分表达式,它适用于自由表面和金属化表面上声表面波传播与散射分析。然后应用此表达式导出压电晶体材料声表面波机电耦合系数K2作为材料常数函数的近似解析表达式。并进一步求解了短路金属栅阵在同步频率附近的波表面反射系数,给出其作为基底与金属膜材料常数和金属条几何参数函数的解析表达。结果特别指出了导致上述效应的各种物理机制间的相互关系。数值结果与实验结果相符,变分处理简化了数学过程而突出了其中物理规律。

     

    Abstract: A variational expression of angular frequency ω2 is proposed for surface acoustic waves propagating on both free and metallized surfaces of piezoelectric crystals. From this expression an analytical solution for SAW piezoelectric coupling ceofficient, K2, can be derived as a function of piezoelectric crystal constants. Comparison of the variational evaluations of K2 with the exact data obtained by computer iterative algorithm shows the applicability of this expression as a guidance for estimating K2 of piezoelectric crystals. Furthermore, by means of the combination of this expression with the coupling-of-modes theory, the analysis of the shorted-circuit metal strip grating can be significantly simplified. The SAW reflectivity of a single strip in the grating will be cast into closed form functions of material constants and strip geometric parameters. The result of reflectivity correctly explains the published experiments and, in particular, the phase behavior of reflectivities of different strip film and substrate configurations. The numerical results of reflectivities are in agreement with the published experimental data.

     

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