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AT切型石英振子耦合T型波的频谱分析和能陷判据

ANALYSIS OF FREQUENCY SPECTRUM OF COUPLED T-TYPE WAVE IN AT-CUT QUARTZ VIBRATOR

  • 摘要: 本文从理论上和实验上研究了AT切型石英振子耦合T型波的频谱分析和能陷判据。在理论部分,引入两个等效应力(T1=γ11S1T5=γ55S5),再计入电极区和非电极区的边界条件,以及电极质量负载效应和压电效应等,即可得到描述T型波传播特性的方程组。从这些方程组出发,我们计算了耦合T型波的频谱,给出了有限电极条件下厚度-切变模和厚度-扭曲模的能陷判据,并得到了最佳矩形电极尺寸与弹性常数的关系。在实验部分,分别测量了不同电极尺寸和质量负载条件下,基频约为30MHz和100MHz的AT切型石英振子的频谱。实验结果与理论结果相符。最后,还用上述理论设计制成了单频性很好的高频石英谐振器。

     

    Abstract: In this paper we present theoretically and experimentally a study of the frequ-ancy spectrum of coupled T-type wave in AT-cut quartz vibrator. In the theoretical part of our paper, we have derived a simple wave equation of AT-cut quartz vibrator by introducing two equivalent stresses (T1=r11 S1 and T5 = r55 S5). By considering also the boundary conditions of the plated and unplated regions of a plate as well as the mass loading and piezoelectric effect, a set of equations describing the propagation characteristics of coupled T-type wave are given. Form these equations we have calculated the frequency spectrum of coupled T-type wave. The energy trapping criteria of thickness/shear mode and thickness/twist mode with finite rectangular electrode are given. The relation between the best size of rectangular electrode and elastic coefficient is obtained.
    In the experimental part of our paper, we have measured the frequency spectrum of AT-cut quartz vibrator with various electrode size and mass loading at fundamental frequency of about 30 MHz and 100 MHz respectively. The experimental data are in good agreement with the theoretically calculated values. Finally, an AT-cut quartz resonator with dominant single frequency characteristic is realized by using the theory developed in this paper.

     

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