SAW声电互作用一些新的实验现象

SOME NEW EXPERIMENTAL PHENOMENA IN SAW ACOUSTOELECTRIC INTERACTIONS

摘要: 本文主要是实验研究不同表面处理的硅片和直流偏压对隙式实时声表面波(SAW)声电卷积器卷积效率的影响。对于热氧化长有1000Å厚SiO₂层,并在N₂气中退火的硅片构成的卷积器,观察到一些新现象。简单地给出了理论解释的结果。

Abstract: This paper experimentally investigates the effect of DC bias voltage on the convolution efficiencies of air-gap coupled acoustoelectric convolvers which are made of various surface-treated silicon strips. For the silicon strips which are thermally oxidized to form 1000 Å thick SiO₂ films and then annealed in nitrogen atmosphere, there appear some new phenomena. We have derived their theoretical explanations, but these are here only briefly mentioned.