Abstract: Surface acoustic wave atomization offers advantages such as concentrated energy, compact size, and low power consumption. However, its efficiency is constrained by instability mechanisms, device frequency, and droplet size. This study focuses on capillary wave disturbances on the surface of micro-droplets during the atomization process. Based on thin-film lubrication theory, the evolution of the thin-film interface under surface acoustic wave excitation is derived, and the characteristics of capillary waves are revealed through numerical simulations. Experimental observations of liquid surface fluctuations validate the frequency of the capillary wave, and the influence of device frequency is analyzed. The results demonstrate that precise control of device frequency and optimization of capillary wave characteristics enable the desired control of aerosol particle size, thereby enhancing atomization efficiency.