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基于氧化锌薄膜声表面波器件的细胞富集方法

Cell enrichment method based on zinc oxide thin film surface acoustic wave device

  • 摘要: 针对常见的铌酸锂等压电单晶在高温易碎裂且不能弯曲等问题, 提出了一种区别于传统压电单晶富集细胞的方法。通过磁控溅射技术在硅衬底上制备了厚度为3.83 μm的氧化锌薄膜, 并用扫描电子显微镜与X射线衍射表征了薄膜性能, 在薄膜表面制备了频率为195 MHz的叉指换能器, 插入损耗为−33.8 dB,且仿真分析了该器件的声场。 结果表明,表面波声束集中在换能器声孔径处, 液滴位于声束边缘。实验结果表明, 该器件能够驱动液滴产生3.9 × 10−3 m/s流速的涡旋, 并在 20 s内富集了悬浮于液滴中的微球和人体淋巴细胞, 将液滴中细胞的浓度提升55倍。

     

    Abstract: To address common issues such as fragility and lack of flexibility at high temperatures in traditional piezoelectric single crystals like LiNbO3, an approach diverging from conventional cell-enrichment piezoelectric crystals is proposed. This approach involves the fabrication of a zinc oxide (ZnO) film, approximately 3.83 μm thick, on a silicon substrate using magnetron sputtering technology. The performance of the film was characterized using scanning electron microscopy (SEM) and X-ray diffraction (XRD). Furthermore, a 195 MHz interdigital transducer (IDT) was prepared on the film’s surface, exhibiting an insertion loss of −33.8 dB. The acoustic field of the device was simulated and analyzed. The results show that the surface wave acoustic beam is concentrated at the acoustic aperture of the transducer, and the droplets are located at the edge of the acoustic beam. Experimental findings demonstrated that the device was capable of inducing droplet vortex formation with a flow velocity of 3.9 × 10−3 m/s. Moreover, the device effectively enriched suspended microspheres and human lymphocytes within the droplet, resulting in a 55-fold increase in cell concentration within 20 seconds.

     

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